| Обозначение | Заглавие на русском языке | Статус | Язык документа | Цена (с НДС 20%)
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Stationary source emissions - Measurement method for volumetric flow rate of Non-CO2 GHG(CF4, NF3, SF6, N2O) in semiconductor and display manufacturing process
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Cleanrooms and associated controlled environments - Part 1:Classification of air cleanliness by particle concentration
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Cleanrooms and associated controlled environments - Part 2:Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
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Cleanrooms and associated controlled environments - Part 3: Test methods
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Cleanrooms and associated controlled environments - Part 4:Design, construction and start-up
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Cleanrooms and associated controlled environments - Part 5: Operations
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Cleanrooms and associated controlled environments - Part 6: Vocabulary
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Cleanrooms and associated controlled environments - Part 7: Separative devices(clean air hoods, gloveboxes, isolators and mini-environments)
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Cleanrooms and associated controlled environments - Part 8:Classification of air cleanliness by chemical concentration(ACC)
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Cleanrooms and associated controlled environments - Part 9:Classification of surface cleanliness by particle concentration
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Cleanrooms and associated controlled environments - Part 10:Classification of surface cleanliness by chemical concentration
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Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
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Cleanrooms and associated controlled environments - Part 13: Cleaning of surface to achieve defined levels of cleanliness in terms of particle and chemical classifications
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Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
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Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
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Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices
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Cleanrooms and associated controlled environments - Biocontamination control - Part 1: General principles and methods
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Cleanrooms and associated controlled environments - Biocontamination control - Part 2: Evaluation and interpretation of biocontamination data
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