KS D ISO 16413 | | | Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting |
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Библиография | Обозначение | KS D ISO 16413 | | Международный стандарт | ISO 16413:2020(IDT) | | Заглавие на английском языке | Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting | | Дата опубликования | 2021.07.16 | | Код МКС | 35.240.70,71.040.40 | |
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Стандарт KS D ISO 16413 входит в рубрики классификатора:
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